Applications
• Solar • Polysilicon • CVD • Pyrophoric/flammable gas combustion • Gas cabinet vent purge |
Advantages
• Simultaneous treatment of multiple chambers and tubes • Low cost of ownership • Immediate cool down • Natural gas fueled • Low maintenance • MTBF measured in years |
GS4
Specifications |
|||
Performance | |||
• Inert Gas Capacity | |||
220slm for H2 and CH4 (CH4 requires flame stability kit to achieve this capacity)* | |||
• Exhaust Air Flow | |||
250 - 550scfm (118 – 260 lps) | |||
• Power Consumption | |||
200 watts | |||
• Fuel Consumption | |||
15 – 37.5 slm Hydrogen, or 12 – 16.5 slm Nat Gas/LPG | |||
• Clean Dry Air | |||
3.5 slm (7.5 scfh) | |||
• Nitrogen | |||
100 slm (212 scfh) only required with optional flash back arrester | |||
Facilities | |||
• Inlet connection options | |||
KF40, KF50, 1/2" VCR | |||
• Nitrogen | |||
80 – 100 psig | |||
• Clean Dry Air | |||
80 psig (552 kPa) 3/8" compression fitting | |||
• Electrical | |||
115 VAC, 50/60 Hz, 10A | |||
• Process Exhaust | |||
4 in I.D. (102mm), 4.5 in O.D. (114mm) | |||
• Fuel Supply | |||
Hydrogen - 35psig (241 kPa), 1/4" VCR
Natural Gas - 7.5 in w.c. 1/2" compression |
|||
• Dimensions | |||
42H x 19W x 36D inches (1,067 x 483 x 914 mm) | |||
• Weight | |||
200lbs (91Kg) | |||
GS8
Specifications |
|||
Performance | |||
• Inert Gas Capacity | |||
600slm for H2 and CH4 (CH4 requires flame stability kit to achieve this capacity)* | |||
• Exhaust Air Flow | |||
800-2000scfm (378 – 944 lps) | |||
• Power Consumption | |||
200 watts | |||
• Fuel Consumption | |||
15 – 37.5 slm Hydrogen, or 12 – 16.5 slm Nat Gas/LPG | |||
• Clean Dry Air | |||
3.5 slm (7.5 scfh) | |||
• Nitrogen | |||
100 slm (212 scfh) only required with optional flash back arrester | |||
Facilities | |||
• Inlet connection options | |||
KF40, KF50, 1/2" VCR | |||
• Nitrogen | |||
80 – 100 psig | |||
• Clean Dry Air | |||
80 psig (552 kPa) 3/8" compression fitting | |||
• Electrical | |||
115 VAC, 50/60 Hz, 10A | |||
• Process Exhaust | |||
4 in I.D. (102mm), 4.5 in O.D. (114mm) | |||
• Fuel Supply | |||
Hydrogen - 35psig (241 kPa), 1/4" VCR
Natural Gas - 7.5 in w.c. 1/2" compression |
|||
• Dimensions | |||
42H x 19W x 36D inches (1,067 x 483 x 914 mm) | |||
• Weight | |||
200lbs (91Kg) | |||
*The inert capacity of CH4 fuel without the flame stability kit is: GS4 110slm and GS8 180slm | |||
Applications
• Solar • Polysilicon • CVD • Pyrophoric/flammable gas combustion • Gas cabinet vent purge |
Advantages • Simultaneous treatment of multiple chambers and tubes • Low cost of ownership • Immediate cool down • Natural gas fueled • Low maintenance • MTBF measured in years |
GS4
Specifications |
|||
Performance | |||
• Inert Gas Capacity | |||
220slm for H2 and CH4 (CH4 requires flame stability kit to achieve this capacity)* | |||
• Exhaust Air Flow | |||
250 - 550scfm (118 – 260 lps) | |||
• Power Consumption | |||
200 watts | |||
• Fuel Consumption | |||
15 – 37.5 slm Hydrogen, or 12 – 16.5 slm Nat Gas/LPG | |||
• Clean Dry Air | |||
3.5 slm (7.5 scfh) | |||
• Nitrogen | |||
100 slm (212 scfh) only required with optional flash back arrester | |||
Facilities | |||
• Inlet connection options | |||
KF40, KF50, 1/2" VCR | |||
• Nitrogen | |||
80 – 100 psig | |||
• Clean Dry Air | |||
80 psig (552 kPa) 3/8" compression fitting | |||
• Electrical | |||
115 VAC, 50/60 Hz, 10A | |||
• Process Exhaust | |||
4 in I.D. (102mm), 4.5 in O.D. (114mm) | |||
• Fuel Supply | |||
Hydrogen - 35psig (241 kPa), 1/4" VCR
Natural Gas - 7.5 in w.c. 1/2" compression |
|||
• Dimensions | |||
42H x 19W x 36D inches (1,067 x 483 x 914 mm) | |||
• Weight | |||
200lbs (91Kg) | |||
GS8
Specifications |
|||
Performance | |||
• Inert Gas Capacity | |||
600slm for H2 and CH4 (CH4 requires flame stability kit to achieve this capacity)* | |||
• Exhaust Air Flow | |||
800-2000scfm (378 – 944 lps) | |||
• Power Consumption | |||
200 watts | |||
• Fuel Consumption | |||
15 – 37.5 slm Hydrogen, or 12 – 16.5 slm Nat Gas/LPG | |||
• Clean Dry Air | |||
3.5 slm (7.5 scfh) | |||
• Nitrogen | |||
100 slm (212 scfh) only required with optional flash back arrester | |||
Facilities | |||
• Inlet connection options | |||
KF40, KF50, 1/2" VCR | |||
• Nitrogen | |||
80 – 100 psig | |||
• Clean Dry Air | |||
80 psig (552 kPa) 3/8" compression fitting | |||
• Electrical | |||
115 VAC, 50/60 Hz, 10A | |||
• Process Exhaust | |||
4 in I.D. (102mm), 4.5 in O.D. (114mm) | |||
• Fuel Supply | |||
Hydrogen - 35psig (241 kPa), 1/4" VCR
Natural Gas - 7.5 in w.c. 1/2" compression |
|||
• Dimensions | |||
42H x 19W x 36D inches (1,067 x 483 x 914 mm) | |||
• Weight | |||
200lbs (91Kg) | |||
*The inert capacity of CH4 fuel without the flame stability kit is: GS4 110slm and GS8 180slm | |||